• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    According to various embodiments, a base arrangement (102, 152, 202, 302, 402, 452, 502, 602, 702) for holding an end block (104) on a process chamber can have the following: a first base element (312) with a first fastening arrangement (110 ) for fastening the first base element (312) to a process chamber wall and with a second fastening arrangement (102a); and a second base element (322) with a first fastening arrangement (102b) for fastening the second base element (322) to the first base element (322) and with a second fastening arrangement (120) for fastening an end block (104) to the second base element ( 322); wherein the second fastening arrangement (102a) of the first base element (312) and the first fastening arrangement (102b) of the second base element (322) can be designed for interlocking with play such that the second base element (322) relative to the first base element (312 ) can be deflectable.
    公开号:BE1023248B1
    申请号:E2015/5647
    申请日:2015-10-09
    公开日:2017-01-11
    发明作者:Sebastian Siegert；Gerit Stude；Florian Wiegand；Gerd Arnold；Hans-Jürgen Heinrich
    申请人:Von Ardenne Gmbh；
    IPC主号:
    专利说明:

    End block assembly and socket assembly
    The invention relates to an end block assembly and a socket assembly.
    In general, workpieces or substrates may be processed or treated, e.g. machined, coated, heated, etched and / or structurally altered. One method of coating a substrate is sputtering, so-called sputtering or sputter deposition. For sputtering, a plasma-forming gas (the so-called working gas) can be ionized by means of a cathode and with the plasma formed in the process a material to be deposited, the so-called target material, is atomized. The sputtered target material can then be brought to a substrate where it can attach and form a layer.
    One modification of cathode sputtering is, for example, sputtering by means of a magnetron, the so-called magnetron sputtering. For magnetron sputtering, the formation of the plasma can be assisted by means of a magnetic field, which can influence the ionization rate of the plasma-forming gas. In this case, an intense plasma in the form of a plasma channel can be formed, which follows the course of the magnetic field. Even removal of target material may require moving it relative to the plasma channel and thus to the magnetic field. For this purpose, the cathode can be configured tubular, as a so-called tube cathode, which may have a target base tube (also called carrier tube) whose outer circumferential surface is at least partially covered by target material. In the interior of the target base tube, a magnetic system for generating the magnetic field may be arranged, so that when rotating the target base tube around the magnet system, the target material arranged on the target base tube moves under the plasma channel and can thereby be removed and atomized in layers.
    According to various embodiments, components used to rotatably support and supply a tubular cathode (e.g., a rotary union, a rolling bearing, a mechanical drive, an electrical feed, and / or a seal) may be provided as a so-called end block. Two such end blocks may hold a tubular cathode at their opposite end portions and may be mounted to process a substrate in a suitable processing chamber.
    Conventionally, an end block from outside the processing chamber is bolted to a chamber wall of the processing chamber (through the chamber wall). An exact one
    Alignment of the endblock may require, during bolting, to control and if necessary correct the position of the endblock from within the processing chamber. Therefore, to assemble the end block, more than one person or additional tools have been needed to coordinate the screwing and alignment of the end block from opposite sides of the chamber wall.
    Further, an end block is conventionally rigidly bolted to a chamber wall of the processing chamber. However, the tubular cathode may be curved due to its own weight and / or imbalances due to manufacturing inaccuracies and thus be deflected out of its axis of rotation. Clearly, the tube cathode can be bent in the direction of the gravitational force. Due to the deflection from the axis of rotation, a tilting moment can be transmitted to the rolling bearings of the end block, which additionally stresses them mechanically. This additional mechanical stress can significantly shorten the life of the bearings and therefore cause additional maintenance costs.
    In DE 10 2008 033902 Al a support device is described, which has a pendulum holder for holding a connection plate, wherein an end block can be attached to the connection plate.
    In US 2003/136672 Al an end block is described, which has a loosely received coupling for coupling a magnetron cathode, so that a greater tolerance for manufacturing errors is provided.
    EP 1 752 557 A1 describes an intermediate plate for compensating for a tumbling motion of the magnetron cathode.
    WO 2007/147757 A1 describes an elastic sealing ring or an elastic housing for compensating a deformation of the magnetron cathode.
    According to various embodiments, a socket assembly is provided which facilitates the mounting of an end block. For this, the base assembly may be secured to the chamber wall, and the end assembly may be secured to the base assembly so as to permit screwing and positioning of the end block from one side of the chamber wall (process side). In other words, by means of the base arrangement, a second screwing level can be provided on the process side for fastening the end block, which makes it possible to mount / demount the end block on the chamber wall. As a result, costs, installation time and effort can be saved.
    Further, according to various embodiments, the mechanical stress of the end block, which may be generated due to the inherent weight of the tubular cathode, may be reduced. For this purpose, the base arrangement allow a tilting and / or rotation of the end block relative to the processing chamber, so that it can align with the tube cathode and the tilting moment is reduced in the end block. In other words, the position of the rolling bearings in the end block can be adaptable to the position or shape of the tube cathode.
    According to various embodiments, a socket assembly for holding (and / or mounting) an end block to a process chamber (also referred to as a processing chamber) may include: a first socket member having a first mounting arrangement for attaching the first socket member to a process chamber wall and having a second mounting arrangement; a second socket member having a first mounting arrangement for attaching the second socket member to the first socket member and a second mounting arrangement for attaching an end block to the second socket member; wherein the second mounting arrangement of the first socket element and the first mounting arrangement of the second socket element for engagement with play can be designed such that the second socket element is deflectable relative to the first socket element.
    According to various embodiments, the second fastening arrangement of the first base element and the first fastening arrangement of the second base element may be detachably arranged so that they can be inserted into one another such that the second base element can be removed from the first base element. Thus, it can be achieved, for example, that the two base elements can be separated from one another for maintenance purposes. In other words, the base assembly may be formed in two parts.
    According to various embodiments, the second mounting arrangement of the second socket element for fixing an end block to the second socket element (illustratively in a second mounting plane) may be formed separately from the first mounting arrangement of the first socket element (illustratively a first mounting plane). In other words, the end block may be assembled / disassembled to the socket assembly without having to disassemble the socket assembly from the chamber wall and / or without having to disassemble the socket members.
    In accordance with various embodiments, a socket assembly may further include a sealing structure for sealing a gap between the first socket member and the second socket member, wherein the sealing structure is disposed between adjacent portions of the first socket member and the second socket member.
    A sealing structure may comprise at least one sealing area and a seal arranged in the sealing area, e.g. a vacuum seal. For fixing the gasket, a sealing structure may have a depression, e.g. a groove or a groove, in the sealing region, wherein the seal can be arranged in the recess. The seal may be configured to prevent or at least limit mass transfer between two spaces or volumes sealed by the seal.
    According to various embodiments, the first base member may have a further sealing area for sealing against a process chamber wall, and the second base member may have another sealing area for sealing a connection with the end block. For example, a sealing area may include a recess for receiving a seal or a sealing surface, e.g. a smooth polished surface, which may or may be pressed against a seal for sealing.
    A fastening arrangement may comprise a connecting element, e.g. a bolt, a threaded pin (also called a threaded rod), a rivet, a clamp, a threaded nut or a screw. Further, a mounting arrangement may include a mating opening (or recess) for receiving a connector, e.g. a through hole, a blind hole or a threaded hole.
    According to various embodiments, the socket assembly may further comprise a spacer element attachable to the second mounting arrangement of the second socket member and defining a distance between the second socket member and an end block to be attached thereto. The spacer element may for example comprise or be formed from a metal or a metal alloy. The spacer may also be referred to as a target substrate spacer (TSD).
    According to various embodiments, the spacer element may comprise a thermally and / or electrically insulating material for thermally and / or electrically insulating the second base element from an end block to be fastened thereto. The spacer element can then also be referred to as insulating. The spacer element can be coated, for example, with the thermally and / or electrically insulating material or be formed therefrom for forming an insulating element. According to various embodiments, a spacer element made of metal may be combined with a spacer element of a thermally and / or electrically insulating material or be or be coated by means of a thermally and / or electrically insulating material.
    According to various embodiments, the thermal and / or electrically insulating material may have low thermal and / or electrical conductivity (measured at room temperature), e.g. a thermal conductivity of less than about 1 W / (mK), e.g. less than about 0.1 W / (m K) and / or electrical conductivity (measured at constant electric field direction) of less than about 10'5 S / m, e.g. For example, the thermally and / or electrically insulating material may comprise a ceramic, porcelain, glass or another dielectric, for example an oxidic ceramic (such as aluminum oxide (A1203) or zirconium oxide (ZrO2)), a glass ceramic, a nitride ceramic (such as silicon nitride (Si 3 N 4)) and / or a carbide ceramic (such as silicon carbide (SiC)), for example a sintered and / or pressed ceramic Alternatively, the thermally and / or electrically insulating material may be a plastic, for example a siloxane (such as silicone) or have a silicate.
    According to various embodiments, the base assembly may further comprise a resilient element which is arranged between the first base member and the second base member, so that the second base member is deflectable relative to the first base member against a restoring force. According to various embodiments, the first mounting arrangement of the first socket element may have a radially outwardly projecting projection and the second mounting arrangement of the second socket element may have a radially inwardly projecting projection which, when assembled together (in other words in an assembled state), overlap each other, with the resilient element between can be arranged the projections.
    According to various embodiments, the resilient element may be understood as a structural element which gives way under load (e.g., stretching or compressing) and may return to its original shape upon release, i. Resiliently resetting behaves (reversible deformation). In other words, the elastic element can be stretched / upset to a yield point without plastically deforming or being plastically deformed only slightly (e.g., less than 0.2% permanent set) or without breaking. According to various embodiments, the resilient element may expand to a deformation of greater than about 1%, e.g. greater than about 10%, e.g. greater than about 50%, e.g. of more than about 100%, elastically restoring behavior. The deformation can be understood as the ratio of the change in length (or width change) to the original length (or width) of a stretched or compressed elastic element. If the elastic element is stretched / compressed this can produce a restoring force, which is directed against the stretching / upsetting. The restoring force (measured at constant strain / compression) can be greater, the harder the resilient element is, i. the larger its spring constant.
    According to various embodiments, the resilient element may comprise an elastic material, for example a plastic, such as an elastomer, a polymer or a co-polymer, e.g. Rubber, silicone, silicone rubber, fluorinated silicone rubber, natural rubber, or other suitable (e.g., soft and / or vacuum grade) plastic. For example, the polymer or co-polymer may comprise silicon.
    The elastic limit and / or the spring constant of the resilient element may or may not be affected by the material and / or a shape of the resilient element. The larger the elastic modulus of the elastic material or the greater the material thickness of the elastic material (i.e., the more massive the elastic member is), the larger the spring constant of the elastic member can be. The spring constant of the resilient element may e.g. the larger the Shore hardness of the elastic material is, the greater. For a given spring constant, the smaller the elastic modulus of the elastic material, the more massive (e.g., as a plate or cylinder, e.g., an elastomeric spring) can be formed.
    According to various embodiments, the elastic material may be metallic, e.g. Steel (e.g., spring steel) or another metal, metal alloy, or intermetallic compound. For example, the resilient member may comprise a metal spring or a plastic spring (e.g., in the form of a cup spring, leg spring, torsion spring, leaf spring, or other spring form).
    According to various embodiments, one of the projections may define a recess (e.g., in the form of a groove or a crease) in the corresponding socket member into which the other projection (e.g., in the form of a tab) may engage when the socket members are mated together. The projection which delimits the depression can also be referred to as the wall section of the depression. The mounting arrangements (e.g.
    Projection and / or depression) may e.g. a section of one of the base elements revolve.
    According to various embodiments, a socket assembly may further include a connector penetrating the second mounting arrangement of the first socket member and the first mounting arrangement of the second socket member. For example, the connecting element can penetrate the projections.
    According to various embodiments, the second fastening arrangement of the first base element and / or the first fastening arrangement of the second base element may have an opening into which the resilient element protrudes and (eg therein) a connecting element (eg a screwing section) for connecting the resilient element another connecting element (eg with the connecting element penetrating the projections). For example, the resilient member may be configured such that a screw may or may be screwed therein, i. the resilient element can act as a connecting element. For example, the screwing section can be formed by means of an opening with an internal thread in the resilient element. The spring-elastic element may be formed, for example, as a blind rivet nut (also referred to as threaded hollow rivet or riveting nut).
    According to various embodiments, the second mounting arrangement of the first socket element and the first mounting arrangement of the second socket element may surround a passage opening penetrating the socket arrangement for mounting a supply arrangement. The passage opening can also be referred to as a supply opening.
    According to various embodiments, a supply arrangement may be accommodated in the passage opening. A supply arrangement may e.g. a conduit for transporting a cooling fluid to the end block, a traction mechanism for transmitting mechanical force to the end block, a shaft for transmitting mechanical force to the end block, or an electrical conduit for transmitting electrical energy to the end block. The supply arrangement may be attached to the end block or be, for example.
    According to various embodiments, an end block assembly may include an end block for rotatably supporting a tubular cathode and a socket assembly for
    Attach the end block. According to various embodiments, the end block may be attached to the socket assembly. According to various embodiments, the socket assembly may be attached to a chamber wall.
    According to various embodiments, the first fastening arrangement of the first base element can have a threaded blind hole which extends into the base arrangement.
    Illustratively, the second fastening arrangement of the first base element and the first fastening arrangement of the second base element may be part of a coupling structure which couples the first base element and the second base element to one another in a movable manner. The coupling structure can clearly act as a joint between the first base element and the second base element. In order to generate a restoring force when the second base element is deflected relative to the first base element, the coupling structure may have, for example, a spring-elastic element.
    The coupling structure may act to dampen oscillations (repeated deflections) of one of the base elements or, in the event of shocks (in other words pulsed forces) on / against one of the base elements. In other words, the first base element and the second base elements can be coupled to one another in a vibration-damped manner by means of the coupling structure.
    The coupling structure may comprise a connecting element of the elastic material, e.g. in the form of a nut or blind rivet nut. For connecting the two base elements together, another connection element of the coupling structure, e.g. a screw, rivet or set screw received in the elastic material, e.g. screwed in, be.
    The connection elements of the coupling structure can be arranged in suitable openings or indentations of the second fastening arrangement of the first base element and / or of the first fastening arrangement of the second base element. According to various embodiments, the coupling structure may, for example, have a screw connection or riveted connection, which connects the fastening arrangements to one another. The openings or recess in the mounting arrangements may be arranged and arranged such that they are aligned with one another in a nested condition of the two base elements.
    The coupling structure can enable a positive connection of the two base elements with each other. For example, in that the resilient element is arranged between the two fastening arrangements and / or in that the two base elements are or are connected to one another by means of a connecting element of the coupling structure.
    The socket assembly, or a socket member of the socket assembly, may comprise a metal or metal alloy, e.g. Aluminum, iron, an aluminum alloy or an iron alloy (e.g., steel).
    According to various embodiments, a pedestal assembly for holding an end block may include: a first pedestal member for securing the pedestal assembly to a processing chamber; and a second socket member for securing the socket assembly to an end block; wherein the one of the base elements with a first portion can protrude into a second portion of the other of the base elements; wherein the first portion and the second portion are intermeshable such that the first base member and the second base member are deflectably coupled (or connected) to each other; and a sealing structure surrounding the first portion, which seals a gap between the first portion and the second portion.
    According to various embodiments, an end block assembly may include: at least one end block for rotatably supporting a tubular cathode; a socket assembly for holding the end block; wherein the socket assembly may include a first mounting arrangement for connecting the socket assembly to a wall member (e.g., a chamber wall); and wherein the socket assembly opposite the first attachment assembly may include a second attachment assembly for connecting the socket assembly to the end block, wherein the second attachment assembly may include a through opening that penetrates a projection of the socket assembly. Such a base assembly may be integrally formed according to various embodiments. An integrally formed socket arrangement may e.g. be used when the mechanical loads on the end block are tolerated and only the assembly of the end block to be facilitated. For example, the one-piece (or one-piece) socket assembly may hold one end block of the end block pair and be combined with a two-piece socket assembly (with a coupling structure) that can hold the other end block of the end block pair.
    According to various embodiments, by means of an end block, a tube cathode can be supplied with electrical energy, with a coolant (e.g., a cooling liquid), and / or with mechanical energy to rotate the tube cathode. These may be supplied to the end block from outside the vacuum chamber through a chamber wall of the vacuum chamber by means of the supply arrangement.
    The end block may be further configured such that the tubular cathode can be replaced after, for example, the target material is consumed. For example, the end block may include a support (e.g., a flange or a coupling) such that the tubular cathode may or may be rotatably attached to the end block. Further, the tubular cathode may be supported at one end portion or at both (axial) end portions by means of an end block (which form an end block pair). Each end block of the end block pair may be part of an end block arrangement as described herein. Further, the driving components (eg, engine, transmission, and / or belt) of the supply structure in an end block of the end block pair (the so-called drive end block) and the supplying components (eg, the electrical supply and / or the coolant supply) of the supply structure in the other end block of Endblockpaars be arranged (the so-called media end block).
    The end block assembly and the tube cathode may be part of a magnetron (a so-called tube magnetron), with which the sputtering can take place. For sputtering, the endblock assembly may be disposed within a processing chamber and secured to a chamber wall of the processing chamber. The magnetron and the processing chamber may be part of a processing arrangement. The processing assembly may further include a transport system for transporting the substrate to be coated in the processing chamber.
    Furthermore, the sputtering can be done in a vacuum. For this purpose, the processing chamber can be set up as a vacuum chamber and coupled to a pump system, so that a vacuum and / or a negative pressure can be provided within the processing chamber. Further, the processing chamber may be configured such that the environmental conditions (the process conditions) within the processing chamber (e.g., pressure, temperature, gas composition, etc.) may be adjusted or regulated during sputtering. The processing chamber can be, for example, airtight, dustproof and / or vacuum-tight set up or become. For example, the processing chamber may be supplied with an ion-forming gas (process gas) or a gas mixture (e.g., a process gas and a reactive gas) via a gas supply to form a process atmosphere in the processing chamber.
    In a reactive magnetron sputtering, the sputtered target material may be reacted with the reactive gas and the reaction product precipitated. An endblock assembly as described herein may be used, for example, for tubular magnetron vacuum coating equipment.
    According to various embodiments, a magnetron assembly for sputtering may include a first endblock as described herein and a second endblock as described herein. The first end block and the second end block may form an end block pair for rotatably supporting and supplying a tubular cathode. According to various embodiments, at least one of the end blocks of the end block pair may be supported by a socket assembly as described herein. According to various embodiments, the magnetron assembly may comprise a tube cathode rotatably supported by the end block pair. According to various embodiments, one end block of the end block pair may be formed as a drive end block and the other end block of the end block pair as a media end block.
    Alternatively, an end block for driving and supplying the tube cathode with a medium may be arranged. Then, the end block opposite end portion of the tube cathode may be supported by means of a bearing block and rotatably supported. In other words, the bearing block can form an abutment to the end block, on which an end portion of the tubular cathode can be supported.
    A magnetron assembly according to various embodiments may include: a process chamber wall; an end block and another end block (or alternatively a bearing block) which are arranged together to rotatably support and supply a tubular cathode; a socket assembly to which the end block is attached; the process chamber wall having a first attachment arrangement for attaching the socket assembly to the process chamber wall and having a second attachment arrangement for securing the other end block (or alternatively the bearing block) to the process chamber wall; wherein by means of the first fastening arrangement and the second fastening arrangement, a relative position of the end block to the other end block (or alternatively the bearing block) is defined; and wherein the base assembly is configured to deflect the end block along at least two degrees of freedom relative to the process chamber wall.
    Embodiments of the invention are illustrated in the figures and are explained in more detail below.
    Show it
    FIG. 1A shows a socket arrangement according to various embodiments in a schematic side view or cross-sectional view;
    FIG. 1B shows an end block arrangement according to various embodiments in a schematic side view or cross-sectional view;
    FIG. 2 shows an end block arrangement according to various embodiments in a schematic perspective view;
    FIG. 3 shows an end block arrangement according to various embodiments in a schematic side view or cross-sectional view;
    4A and 4B each show an end block arrangement according to various
    Embodiments in a schematic side view or cross-sectional view;
    FIG. 5 shows a base arrangement according to various embodiments in a schematic perspective view;
    FIG. 6 shows an end block arrangement according to various embodiments in a schematic side view or cross-sectional view;
    7A and 7B each show a socket arrangement according to various embodiments in a schematic side view or cross-sectional view;
    FIG. 8A shows a blind rivet nut according to various embodiments in a schematic perspective view;
    FIG. 8B shows a coupling structure according to various embodiments in a schematic cross-sectional view;
    FIG. 9A shows a coupling structure according to various embodiments in a schematic cross-sectional view;
    FIG. 9B shows a coupling structure according to various embodiments in a schematic perspective view;
    FIG. 10 shows an end block arrangement according to various embodiments in a schematic side view or cross-sectional view; and
    11 and 12 each show an end block arrangement according to various embodiments in a schematic cross-sectional view.
    In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. is used with reference to the orientation of the described figure (s). Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.
    As used herein, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connection, direct or indirect connection, and direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.
    For mounting an end block (on the so-called process side or in the "vacuum") on a chamber wall (for example on a so-called magnetron cover), the end block is conventionally screwed directly to the chamber wall by means of four cylinder screws (corresponding to exactly one screw plane). If the end block has to be disassembled due to maintenance work or a change in the target-substrate distance or subsequently reinstalled, these cylinder screws must be unscrewed and then screwed in again. The access to the cylinder screws is on the side facing away from the end block of the chamber wall (atmosphere side), so that actuation of the cylinder screws takes place from the side facing away from the end block of the chamber wall ago. Such a screw connection (with exactly one screwing level) makes handling (so-called handling) of the end block during assembly / disassembly difficult. For example, it is difficult for a single service operator (e.g., a single fitter) to see if the end block is centered in the correct position on the chamber wall, since direct observation of the position of the end block from the chamber wall is obstructed or requires separate assistance. So far, therefore, at least a second service, a crane or a special mounting device is required.
    Alternatively, a screwing of an adapter / flange to the chamber wall by means of cylindrical screws (corresponds to a first Verschraubungsebene clearly). The adapter is conventionally equipped with a large union nut which allows a screwing of the end block to the adapter / flange on the process side of the magnetron cover (corresponds to a second Verschraubungsebene). If such a union nut to be changed or cleaned, however, a mounting / dismounting of the adapter / flange is required, which increases the maintenance.
    Conventionally, an end block is rigidly bolted to the magnetron cover. The larger the tube cathode (the so-called target), the more weight (target load) can have the tube cathode and load components for rotatably supporting the support tube (rotational storage). This creates additional mechanical loads (forces and moments) within the end block, which are induced due to high bending moments at high target load. If the rotary bearing (for example, rolling bearings and other adjacent components for rotatably supporting the support tube) absorbs the mechanical stress, its life can be shortened and, as a result, the end block may prematurely lose its function. The shortening of the service life can occur, in particular, when the maximum bending moment occurs at the rotational support in the end block.
    Conventionally, the bending moment (and thus primarily the radial forces) in the rolling bearings is reduced by adjusting an increased bearing clearance in relatively close-fitting ball bearings to allow some axle articulation. Alternatively, the bearings are mounted in a separate inner housing within the end block, which is supported by two large O-rings in the actual outer housing. However, such arrangements allow a relatively low discharge, which is insufficient in many applications.
    With a socket arrangement according to various embodiments, a flexible / elastic fastening of the end block to the chamber wall can be made possible, so that the bending moment profile along the longitudinal extent of the support tube (in the target longitudinal direction) can be changed, and so that the maximum of the bending moment out of the rotary bearing in Direction of the center of the stored carrier tube AVelle (in other words the target) moves. As a result, a relief of the end block can be achieved.
    Fig. 1A illustrates a socket assembly 102 according to various embodiments in a schematic side view or cross-sectional view (e.g., transverse to a mounting plane or process chamber wall 314w, see Fig. 3).
    The socket assembly 102 may include a first socket member 312 having a first mounting arrangement 110 for attaching the first socket member 312 to a process chamber wall (chamber wall) and a second mounting assembly 102a. Further, the socket assembly 102 may include a second socket member 322 which may include a first mounting arrangement 102b for securing the second socket member 322 to the first socket member 312 and a second mounting arrangement 120 for securing an end block to the second socket member 322.
    The second mounting assembly 102a of the first socket member 312 and the first mounting assembly 102b of the second socket member 322 may be configured to intermesh with play such that the second socket member 322 is deflectable relative to the first socket member 312. For this purpose, between the second base element 322 and the first base element 312, a gap 102s may be extended, which allows the game.
    Fig. 1B illustrates an end block assembly 100 according to various embodiments in a schematic side view or cross-sectional view (analogous to Fig. 1A). The end block assembly 100 may include at least one end block 104 for rotatably supporting a tubular cathode 304w (not shown in FIG. 1, see FIG. 3). Furthermore, the end block assembly 100 may include a socket assembly 152 for holding the end block 104.
    The socket assembly 152 may include a first mounting assembly 110 (also referred to as a first bolting plane 110) for connecting the socket assembly 152 to one
    Wall element (e.g., a chamber wall). For example, the first fastener assembly 110 may include one or more female-threaded blind holes into which a screw may or may be screwed. Alternatively, the first mounting assembly 110 may include bolts or set screws extending from the socket assembly 152.
    Further, the socket assembly 102 opposite the first mounting assembly 110 may include a second mounting assembly 120 for connecting the socket assembly 152 to the end block 104. The second attachment assembly 120 may include a through opening 120d that may penetrate a protrusion 102v of the socket assembly 152. A connector (e.g., a screw) may be incorporated in the through-hole 120d, which may or may be connected to the end block 104.
    2 illustrates an end block assembly 200 with a socket assembly 202 according to various embodiments in a schematic perspective view, wherein between the socket assembly 202 (also referred to as mounting flange 202) and the end block 104, a spacer element 206 may be arranged. By means of the spacer element 206, a distance between the base arrangement 202 and the end block 104 can be increased or become. This may be required if e.g. the distance of the tube cathode to a substrate to be coated (the so-called target-substrate distance) should be adjusted (for example, reduced in size). For example, multiple spacers 206 may or may not be combined with each other, e.g. Distance elements 206 may be used with different thicknesses, to adjust the target-substrate distance.
    The target-substrate distance can also be adjusted with different height spacers 206. Thus, there may be several possible combinations of setting a target-substrate distance, for example, only with a spacer element 206 which is adapted to the required target-substrate distance, with a plurality of spacer elements 206 or with or at least one insulating element 206 and at least one spacer element 206.
    The first attachment assembly 110 may further include a plurality of first connection elements 210s, e.g. Screws 210s or cylinder screws 210s as shown in Fig. 2 and mating tapped holes in the socket assembly 202 in which the screws 210s may or may be screwed to secure the socket assembly 202 to a mating chamber wall 314w or chamber lid 314w (in Figs Fig.2 not shown, see for example Fig.3).
    According to various embodiments, the socket assembly 202 may be adapted to a chamber wall 314w or a chamber lid 314w, and on a first side (also referred to as a lid terminal) a sealing structure 202d having a seal, e.g. a vacuum seal. The sealing structure 202 d may surround the first fastening arrangement 110. Furthermore, the base assembly 202 may be configured to fit an end block 104 and have a sealing surface or sealing structure (concealed in this view, see FIG. 3) on a second side (also referred to as an intermediate adapter) in which a seal may be disposed.
    Further, the socket assembly 202 may include a plurality of recesses 202a (e.g., in the form of pockets). For example, the plurality of recesses 202a may be formed at the corners, e.g. At opposite regions, the socket assembly 202 may be disposed, wherein each recess of the plurality of recesses 202a may each define a projection 102v of the socket assembly 202. In other words, the plurality of recesses 202a may define a plurality of protrusions 102v.
    The second fastening arrangement 120 (also referred to as the second screwing plane 120) may have a plurality of through openings 120d, wherein each through opening of the plurality of through openings 120d may penetrate a projection of the plurality of projections 102v. Further, the second mounting arrangement 120 may include a plurality of second connection elements 220s, e.g. Screws 220s or cylinder screws, as shown in Fig.2. In each case a screw 220s can be arranged in a recess 202a, which can extend through a passage opening of the plurality of through openings 120d.
    A bolt 220s of the second mounting assembly 120 may further extend through a mating through hole in the spacer 206 and into the end block 104, e.g. screwed into the end block 104, be. The screws 220s disposed in the recesses 202a may allow attachment of the end block 104 to the socket assembly 202 (process side or also vacuum side). Thus, a positive connection between the base assembly 202, the end block 104 and the spacer element 206 can be achieved.
    Alternatively, the second connection elements 220s can also have a threaded pin fastened to the end block 104 and a nut screwed onto the threaded pin, or the positive connection can be made differently. The use of standard parts, such as cylinder head screws 210s, as connecting elements of the end block arrangement 200, for example, enables a cost-effective production of the end block arrangement 200.
    If the second fastening arrangement 120 has second connecting elements 220s whose length exceeds the extent of the recesses 202a, then the through openings 120d may be formed laterally open according to various embodiments. It can thus be achieved that a connecting element 220s can be brought from a lateral direction into the passage opening 120d.
    At and / or in the end block 104, a shaft 204w (e.g., a hollow shaft 204w), a so-called bearing shaft 204w, may be disposed, and the bearing shaft 204w may extend along the direction 101, for example. The bearing shaft 204w may be rotatably supported or rotatably supported in the end block 104 (e.g., rotatable about an axis of rotation along the direction 101). On the bearing shaft 204w, for carrying out a sputtering process, a target base tube (not shown in Fig. 2, see Fig. 3), e.g. as part of a tubular cathode, be attached or be. For example, the target ground tube may be plugged onto bearing shaft 204w or plugged into bearing shaft 204w and / or alternatively secured or attached to bearing shaft 204w by means of a target attachment (e.g., a flange and / or clamp).
    According to various embodiments, the socket assembly 202 may include an opening 102d (supply opening 102d) that allows the end block 104 to be fed through the socket assembly 202, e.g. to contact electrically to supply with electrical energy.
    Figure 3 illustrates an end block assembly 300 according to various embodiments in a schematic cross-sectional view (analogous to Figure 1A, e.g., parallel to the axis of rotation of the bearing shaft 204w) with a socket assembly 302, wherein the socket assembly 302 may be secured to a chamber wall 314w of a processing chamber. The socket assembly 302 may or may be attached to the chamber wall 314w by screws 210s. The screws 210s for securing the socket assembly 302 may or may be threaded into the socket assembly 302 from a side of the chamber wall 314w remote from the socket assembly 302 (in other words, actuated at the atmosphere).
    The end block assembly 300 may include an end block 104 which may be mounted to the chamber wall 314w (also referred to as a housing wall 314w) by means of the socket assembly 302. The chamber wall 314w may be part of a chamber housing or a chamber lid of the processing chamber. Illustratively, the side of the chamber wall 314w (also called process-side or vacuum-side) facing the end block 104 (in the installed state) may be inside a processing chamber during a sputtering process and the side facing away from the end block 104 (also called the atmosphere side) of the chamber wall 314w (chamber lid). may be outside the processing chamber during a sputtering process.
    If the chamber wall 314w is part of a chamber lid, the processing chamber may have a chamber housing with a chamber opening for lifting the chamber lid. The chamber lid may close the chamber opening in a vacuum-tight manner when the chamber lid is received in the chamber opening, so that the processing chamber can be pumped off to form a vacuum 313 or a process atmosphere within the processing chamber. Within the processing chamber, for example, a vacuum 313 or a process atmosphere 313 may be generated at a pressure of less than 1 mbar, e.g. less than 10 -2 mbar, for example less than 10-4 mbar, for example less than 10 -6 mbar.
    If the chamber housing is closed by means of the chamber lid, the base arrangement 302 can extend into the interior of the chamber housing. To open the chamber housing, the chamber lid can be detachably arranged by the processing chamber or pivotally. For example, opening the chamber housing may facilitate access to the interior of the processing chamber, e.g. for maintenance. Assembly / disassembly of the socket assembly 302, the end block 104, and / or the tube cathode 304w may be accomplished e.g. done with removed chamber lid.
    The socket assembly 302 may be part of a magnetron (or magnetron assembly) by which a substrate is processed, e.g. can be coated. The chamber lid can then also be referred to as a magnetron lid. The magnetron may further include the end block 104 and a tube cathode 304w which may be coupled to the bearing shaft 204w of the end block 104. The tube cathode 304w or the carrier tube may be longitudinally extended along the axis of rotation of the bearing shaft (along direction 101).
    To operate the magnetron, it may be necessary to feed the tube cathode 304w from outside the processing chamber through the chamber wall 314w, e.g. with electric
    Energy, with coolant or with mechanical energy (to rotate the tube cathode 304w). For this purpose, the chamber wall 314w (or analogous to the chamber lid) may have a passage opening 314d, through which the end block 104, or the tube cathode 304w, can be supplied.
    Furthermore, the socket assembly 302 may be penetrated by a mating through-hole 102d (supply opening 102d) and the spacer 206 may be penetrated by a mating through-hole 206d connecting the end block 104 to the through-hole 314d in the chamber wall 314w. The through-opening 102d in the socket assembly 302 may extend from the first side of the socket assembly 302 to the second side of the socket assembly 302 opposite the first side.
    According to various embodiments, the end block 104 may include a base housing 104b. The base housing 104b of the end block 104 may include, for example, the components (bearing shaft 204w, rotating union, rolling bearings, and / or seals) for rotatably supporting the tubular cathode 304w and the supply assembly 1102 (not shown in FIG. 3, see FIG. 11 or FIG partially surrounded and / or support.
    The through opening 102d of the socket assembly 302, the through hole 206d of the spacer 206, and the interior of the end block 104 may form an interior of the end block assembly 300 with the interior of the end block assembly 300 passing through the through opening 314d in the chamber wall 314w with the exterior of the end block assembly 300 Processing chamber (also called the atmosphere side) may be connected.
    If a process atmosphere 313 (eg a vacuum) is formed within the processing chamber, the interior of the end block arrangement 300 may have a pressure that is greater than the pressure of the process atmosphere 313. For example, the interior of the end block arrangement 300 may have approximately atmospheric pressure 311 (FIG. about 100 kPa). For this purpose, the interior of the end block arrangement 300 can be sealed off from the interior of the processing chamber (and thus with respect to the process atmosphere 313) by means of corresponding sealing structures 202d, 306d.
    To seal the interior of the end block assembly 300 from the interior of the processing chamber, a sealing structure 202d, 306d may be disposed between the chamber wall 314w and the socket assembly 302, socket assembly 302 and spacer 206, and spacer 206 and end block 104, respectively Sealing a gap between the adjacent components allows. The sealing structures 202d, 306d may each comprise a vacuum seal (for example a rubber seal), e.g. an O-ring, a flat gasket, a profile gasket or a gasket with a different geometry.
    To operate the tube cathode 304w, it may be at an electrical potential (clearly when it is supplied with electricity). The electrical potential may also be transferred to the end block 104. Therefore, it may be necessary to electrically isolate the end block 104 from the processing chamber or chamber wall 314w (e.g., to ensure worker protection). Further, the end block 104 may be heated during operation of the tube cathode 304w. Therefore, it may be necessary to thermally isolate the end block 104 from the processing chamber or chamber wall 314w. For thermally and / or electrically insulating the end block 104 from the processing chamber (or pedestal assembly 302), the spacer 206 may, according to various embodiments, be made of a thermally and / or electrically insulating material 206i to form an insulating member 206.
    Conventionally, the insulating member 206 may be formed of silicone, which allows a certain flexibility of the insulating member 206. In this case, however, flashovers may occur because the insulating ability of the insulating member 206 is impaired when it yields. Stiffening or limiting the compliance of the insulating member 206 may be increased by means of ceramic balls (as spacers) embedded in the silicone.
    As previously described, the end block 104 may or may be connected to the socket assembly 302 through the spacer 206 through the screws 220s. To thermally and / or electrically insulate the screws 220s from the socket assembly 302, the second mounting assembly 120 of the second socket member 322 may include thermally and / or electrically insulating sleeves 220h (eg, in the form of sockets) extending between the screws 220s and the socket assembly 302 extend. The sleeves 220h may be made of a thermally and / or electrically insulating material 206i.
    The sleeves 220h may be inserted into the passage openings 120d of the second attachment assembly 120 and at least partially extend into the spacer 206. For this purpose, the passage openings 120d of the second fastening arrangement 120 can be dimensioned correspondingly large. Further, the screws 220s may be received in the sleeves 220h and extend through the sleeves 220h.
    The sleeves 220h may be covered with cover plugs 220d (in the form of lids) or may be used to prevent the screws 220s from coating. Thereby, sputtered target material can be prevented from being deposited on the screws 220s and forming a layer (vapor deposition layer) on the screws 220s electrically connecting the screws 220s to the socket assembly 302 or the electrical insulation between the end block 104 and the socket assembly 302 impaired.
    4A illustrates an end block assembly 400 having a socket assembly 402 according to various embodiments in a schematic side view or cross-sectional view (analogous to FIG. 1A), wherein the socket assembly 402 may include two socket members 312, 322. In other words, the base assembly 402 may be formed in two parts.
    The first socket member 312 (also referred to as cover terminal 312) may include a first mounting arrangement 110 as described above. For example, the lid connection 312 can have one or more blind holes into which corresponding screws 210s are screwed. According to various embodiments, the lid fitting 312 may or may be rigidly bolted to the chamber wall 314w (e.g., a magnetron lid). The second socket member 322 (also referred to as intermediate adapter 322) may include a second mounting arrangement 120 as described above. For example, the intermediate adapter 322 may have one or more passage openings 120d in which corresponding screws 220s are arranged. Alternatively, the intermediate adapter 322 may be attached to the end block 104 by other fasteners.
    Further, the socket assembly 402 may include a coupling structure 432 for coupling the lid terminal 312 to the intermediate adapter 322. The coupling structure 432 may be configured such that the lid terminal 312 and the intermediate adapter 322 are mutually movably coupled (or connected) to each other. For example, the coupling structure 432 may comprise a resilient element, e.g. a rubber plate extending between the first base member 312 and the second base member 322.
    According to various embodiments, the end block assembly 400 may be formed with or without a spacer 206 (indicated by dashed lines). In other words, a spacer element 206 may additionally be used as needed or an end block may be fastened directly to the second base element 322. According to various embodiments, the spacer element 206 may be part of the second socket element 322. In other words, the spacer element 206 and the second base element 322 may be integrally formed.
    4B illustrates a socket assembly 452 according to various embodiments in a schematic side view or cross-sectional view (analogous to FIG. 1A).
    The first base element 312 may project with a first section into a second section of the second base element 322, for example into a recess in the second section. The first portion may be part of the second fastening arrangement 102a of the first base element 312. The second portion may be part of the first attachment assembly 102b of the second socket member 322.
    The mounting assemblies 102a, 102b may be configured such that the second socket member 322 is deflectable along multiple degrees of freedom relative to the first socket member 312, e.g. along one, two or three translational degrees of freedom and a rotational degree of freedom, along one, two or three translational degrees of freedom and two rotational degrees of freedom along one, two or three translational degrees of freedom and three rotational degrees of freedom along two or three translational degrees of freedom or along two or three rotational degrees of freedom. During sputtering, e.g. when the end block 104 is attached to the second socket member 322, the mating fastener assemblies 102a, 102b may prevent the first portion from being brought out of the second portion.
    A rotational degree of freedom (also referred to as rotational degree of freedom) can be understood as rotation about an axis. A translational degree of freedom (also referred to as translational freedom) can be understood as movement along one direction. The number of degrees of freedom can be expressed as a number of mutually independent movement possibilities, e.g. as a number of mutually transverse directions and / or as a number of mutually transverse axes, along which a system can move, or along which the second base element 322 can be deflected.
    Further, the socket assembly 452 may include a sealing structure 412d that circumscribes the first portion. For example, the sealing structure 412d may include a sealing area and a seal disposed in the sealing area. Further, the sealing structure 412d may be configured to seal a gap 102s between the first portion and the second portion. For example, the sealing structure 412d may seal a cavity in the socket assembly 452 from an exterior surrounding the socket assembly 452, e.g. vacuum-tight.
    5 illustrates a socket assembly 502 according to various embodiments in a schematic perspective view, wherein the socket assembly 502 may include two socket members 312, 322 which are at least partially intermeshed and resiliently coupled together.
    For this purpose, the cover connection 312 can have an insertion section in the form of a circumferential groove 412, which can be part of the second fastening arrangement 102a of the cover connection 312. Further, the intermediate adapter 322 may have a male portion in the form of a projection 422 which may be part of the first attachment assembly 102b of the intermediate adapter 322. The groove 412 may be bounded on two opposite sides each by a wall portion (or a projection). The insertion sections can be configured such that they can be inserted into one another for connecting the cover connection 312 to the intermediate adapter 322. For example, the male portions may be configured such that the protrusion 422 may or may not be brought (e.g., plugged) into the groove 412 by means of rotational movement.
    For example, a wall portion of the groove 412 may have one or more cut-outs (e.g., side of the groove facing away from the chamber wall) into which the insertion portion 422 of the second socket member 322, e.g. by means of an upward movement of the second base member 322 relative to the first base member 312 can be introduced. Further, it may be inserted into the groove 412 by means of a rotational movement of the second socket member 322 relative to the first socket member 312, so that a holding connection between the first socket member 312 and the second socket member 322 can be made. The plug-in sections 412, 422 can have a distance from one another when inserted into one another such that a gap extends between the plug-in sections 412, 422, which allows the two socket elements 312, 322 to move relative to one another.
    Between the protrusion 422 and one of the wall portions of the groove 412, a resilient member may be disposed (e.g., in the gap), e.g. in the form of an elastic plate 402e (e.g., a rubber plate or other resilient plate). The elastic plate 402e may define the gap between the projection 422 and one of the wall portions of the groove 412, e.g. at least partially complete. The male portions (protrusion 422 and groove 412) and the elastic plate 402e may be part of the coupling structure 432 of the socket assembly 502.
    A wall portion of the groove 412 may be penetrated by a through-hole 412e which may, for example, allow a connector to be inserted into the groove 412, e.g. a screw or a threaded pin. Further, the through hole 412e may allow to operate the connector, e.g. to rotate, lock, e.g. to screw in or unscrew.
    Further, the pedestal assembly 502 may include a tubular portion 512r (or a tubular extension) which is insertable into the through-opening 314d in the chamber wall 314w.
    6 illustrates an end block assembly 600 having a socket assembly 602 according to various embodiments in a schematic side view or cross-sectional view (analogous to FIG. 1A), with the socket assembly 602 shown mounted to a chamber wall 314w. The pipe section 512r (or pipe socket) of the socket assembly 602 may be configured to be positively received within the through hole 314d of the chamber wall 314w when the socket assembly 602 is mounted to the chamber wall 314w. It can thus be achieved that the position of the base arrangement 602 relative to the chamber wall 314w is defined by the passage opening 314d in the chamber wall 314w, so that an alignment and / or positioning of the base arrangement 602 can be dispensed with.
    Further, the protrusion 422 of the intermediate adapter 322 may be penetrated by a through hole into which a connecting element, e.g. a screw 412s, as shown in Figure 6, be introduced or can be. The screw 412s may be screwed into a mating threaded hole in a wall portion of the groove 412. By means of the screw 412s, the lid terminal 312 and the intermediate adapter 322 can be secured against twisting relative to each other. It can thus be achieved that the cover connection 312 and the intermediate adapter 322 are inserted into one another in a form-fitting manner and a detachment of the cover connection 312 from the intermediate adapter 322 can be avoided.
    The through-holes / tapped holes in the wall portions of the groove 412 and the through-hole in the projection 422 may be aligned with each other with the intermediate adapter 322 in a nested condition of the lid terminal 312.
    7A illustrates a socket arrangement 702 according to various embodiments in a schematic cross-sectional view (analogous to FIG. 1A), and FIG. 7B shows the socket arrangement 702 according to various embodiments in a schematic cross-sectional view along a sectional plane 701.
    In a through hole in a wall portion of the groove 412, a resilient member in the form of a blind rivet nut 402m (e.g., made of an elastomer) may be accommodated. According to various embodiments, a resilient element may e.g. made of an elastomer (e.g., in the form of a blind rivet nut 402m). The blind rivet nut 402m may have a through-hole with a thread (see Fig. 8A) for screwing a screw 412s into the blind rivet nut 402m. Thus, a flexible / elastic fastening between the screw 412s and the wall portion of the groove 412 (a resilient screw connection) can be realized. The end block 104 can thus be flexibly moved relative to the chamber wall 314w (e.g., along three translational and three rotational degrees of freedom) so that the rotational support (e.g., roller bearing) of the end block 104 is mechanically relieved.
    According to various embodiments, the flexible / elastic fastening of the end block 104 can thus be made possible by means of elastic Blindnietmuttem 402m as connecting elements, the Blindnietmuttem 402m can allow a resilient screwing of the two socket elements 312, 322 together. This elastic threaded connection between the chamber wall 314w and the end block 104 may be e.g. be realized by means of several arranged on a pitch blind rivet nut 402m, as shown in Figure 7B.
    According to various embodiments, a blind rivet nut 402m may include a portion extending radially beyond the edge of the through-hole in the wall portion of the groove 412 (a so-called headrest 812m, see Fig. 8A), which projects into the gap between the lid fitting 312 and the intermediate adapter 322 extends into it. The blind rivet nut 402m may be arranged such that the headrest of the blind rivet nut 402m may or may be axially pressurized. This makes it possible in the case of failure of one or more Blindnietmuttem 402m to prevent falling of the screwed end block 104 (or due to a release of the intermediate adapter 322 of the cover terminal 312).
    Compliant bolting of the two socket members 312, 322 together may alternatively be achieved by means of a spring (e.g., a metal spring or plastic spring) into which the screw 412s may or may be threaded.
    Further, the lid terminal 312 may have a recess at the lower end (opposite to the first mounting arrangement 110). The resulting lower annulus 712r may be interrupted / milled between each passage opening in the wall portions of the groove 412 (e.g., corresponding bores) in which a blind rivet nut 402m is received, and thus divided into a plurality of annulus segments.
    For example, the lower annulus 712r may have four annulus segments, as shown in FIG. 7B. According to various embodiments, the lower annulus 712r may be less than four, e.g. two or three, or more than four, e.g. five or six, circular ring segments. The projection 422 of the intermediate adapter 322 may be shaped to fit, e.g. be interrupted / milled and thus have a plurality of analog segments, so that it can be introduced into the cover terminal 312 (between the circular ring segments). For this purpose, the spacing of the circular ring segments relative to one another can be set up such that the segments of the projection 422 of the intermediate adapter 322 can be inserted between the circular ring segments (along a direction perpendicular to the plane 701).
    By means of a rotational movement (along the plane 701), the projection 422 inserted between the circular ring segments can then be inserted into the groove 412 of the cover connection 312, i. in other words, the intermediate adapter 322 may be coupled to the cover port 312 by means of a plug-and-turn motion (analogous to a bayonet lock).
    For relieving the headrest of the blind rivet nuts 402m (or for avoiding overstressing), a resilient member in the form of an elastic plate 402e (e.g., a rubber pad) may be disposed between a wall portion of the groove 412 and the protrusion 422. The elastic plate 402e may at least partially surround the headrest of the blind rivet nuts 402m or be recessed in a manner corresponding to the headrest of the blind rivet nuts 402m. Thus, the elastic plate 402e may hold a portion of the force which may act on the head rest of the blind rivet nuts 402m (also referred to as surface pressure). The elastic plate 402e may be made of an elastic material, e.g. an elastomer (e.g., natural rubber).
    Further, the through opening 102d in the socket assembly 702 (which may define an interior of the socket assembly 702) may be opposed to the exterior of the socket assembly 702, e.g. the processing chamber sealed. For this, the socket assembly 702 may include a sealing structure 412d having a vacuum seal, e.g. an O-ring, having e.g. a quad ring 412d, as shown in Fig. 7A, or another gasket, e.g. an O-ring. The seal structure 412d may be disposed between the interlocking portions of the lid terminal 312 and the intermediate adapter 322. The seal structure 412d may be spaced apart relative to the male portions 422, 412. It can thus be achieved that a relative movement between lid connection 312 and intermediate adapter 322 can be compensated for, wherein a mass transfer, e.g. a gas exchange, which e.g. sputtering may be prevented or at least reduced between the interior of the socket assembly 702 and the exterior of the socket assembly 702 (e.g., the interior of the processing chamber) by way of the seal structure 412d.
    8A illustrates a spring-elastic element in the form of a blind rivet nut 402m (connecting element 402m) according to various embodiments in a schematic perspective view. The resilient member 402m (the blind rivet nut 402m) may include a head rest 812m extending in a radial direction away from a body 822m of the blind rivet nut 402m. The body 822m may be in the form of a cylinder or sleeve as shown in Fig. 8A, or in another form, e.g. with a square cross section or with thickenings. The body 822m and the headrest 812m may be penetrated by a common through-hole 812d. The inner wall of the passage opening 812d can be formed, for example, as an internal thread or be provided with a different type of profiling (screwing section), so that a screw can or can be screwed into the passage opening 812d. The resilient element 402m (the blind rivet nut 402m) may be made of a plastic, e.g. an elastomer, be formed.
    8B illustrates a coupling structure 432 according to various embodiments in a schematic cross-sectional view. The blind rivet nut 402m may be inserted into an opening, e.g. a through hole, in a plate-shaped portion of the socket assembly, or in a projection 412, 422 of the socket assembly as described herein. The blind rivet nut 402m can be extended through the passage opening.
    9A illustrates a coupling structure 432 according to various embodiments in a schematic cross-sectional view. For connecting the lid terminal 312 to the intermediate adapter 322, a screw 412s may or may be screwed into the blind rivet nut 402m. The blind rivet nut 402m may be configured such that upon screwing in the screw 412s, a thickening 402v forms when the screw 412s is screwed into the through hole 812d (e.g., due to material displacement or compression of the body 822m). It can thereby be achieved that the blind rivet nut 402m can be or can be fastened in a form-fit manner in a matching passage opening.
    Furthermore, the blind rivet nut 402m may be elastic such that a relative movement (shown as a contour 901) between the lid connection 312 and the intermediate adapter 322 is made possible. Due to the relative movement between the lid terminal 312 and the intermediate adapter 322, the blind rivet nut 402m may be deformed to provide a restoring force directed toward an equilibrium position between the lid terminal 312 and the intermediate adapter 322, with all restoring forces in the equilibrium position cancel. Clearly, the blind rivet nut 402m in the equilibrium position (also called the rest position) may be the least deformed.
    According to various embodiments, the resilient element may define a rest position of the second socket member 322 relative to the first socket member 312.
    FIG. 9B illustrates a coupling structure 432 according to various embodiments in a schematic perspective view. According to various embodiments, the blind rivet nut 402m and the elastic plate 402e may be integrally (or integrally) formed. Illustratively, the headrest of the blind rivet nut 402m may be shaped to fit the gap between the lid terminal 312 and the intermediate adapter 322 and form the elastic plate 402e.
    10 illustrates an end block assembly 1000 according to various embodiments in a schematic side view or cross-sectional view (analogous to FIG. 1A).
    According to various embodiments, a socket assembly described herein may be bolted to a chamber wall 314w (e.g., a magnetron cover) with interposer 322 and cover terminal 312 as a contiguous assembly (a so-called screw-on set). At the other end of the base arrangement, opposite the chamber wall 314w, an end block 104 can then be screwed or screwed to the attachment set.
    According to various embodiments, the spacer 206 may be plate-shaped and made of electrically and / or thermally insulating material (a so-called insulation plate). The spacer element 206 can have a centering structure 1006b in the form of a projection (a so-called centering collar 1006b) into which the end block 104 or the base housing 104b of the end block 104 can be inserted. It can thus be achieved that the relative position or position of the end block 104 is predefined to the spacer element 206 by means of the centering collar 1006b. Illustratively, centering collar 1006b may cause self-centering of end block 104 on spacer 206.
    Figures 11 and 12 each illustrate an end block assembly 1100 having a socket assembly as described herein according to various embodiments in a schematic cross-sectional view (analogous to Figure 1A).
    The end block 104 may be e.g. be configured as a media end block and components (which form a supply arrangement 1102) for supplying the tubular electrode with a medium, such as a pipe 1102r (as part of a Kühlmittelzufiihrung) or an electrical line (as part of the electrical supply). The coolant supply may be sealed by a seal against the interior of the vacuum chamber, e.g. by means of a rotary feedthrough. For example, the interior of the end block 104 may be at atmospheric pressure, or a coolant supply inside the end block 104 may be at a pressure greater than atmospheric pressure and sealed from the interior of the processing chamber.
    Therefore, it may be necessary to make the end block 104, or base housing 104b, solid and stable (e.g., pressure stable) and, for example, connect to the processing chamber or a portion of the vacuum chamber. The base housing 104b may be formed of a metal, e.g. made of steel or an aluminum alloy. Illustratively, the base housing 104b of the end block 104 may act as part of the chamber wall 314w and be configured to separate vacuum and atmospheric pressure.
    The lid terminal 312 and the intermediate adapter 322 may be configured, e.g. For example, the annulus segments may be spaced apart such that between the annulus segments there is a supply arrangement 1102, e.g. a pipe 1102r, as shown in Fig. 11, fits therethrough. For example, the tubing 1102r may be attached to the end block 104 and assembled with the end block 104. The supply assembly 1102 may further include an electrical conduit that may be attached to the conduit 1102r. The conduit 1102r may be extended through the chamber wall 314w when the end block 104 is assembled.
    Further, the pipe 1002r may have corresponding ports 1102a for connecting the pipe 1002r to a cooling water supply, e.g. with a recirculation pump or surge tank which supplies to the pipeline 1002r coolant, e.g. Cooling water, can supply.
    According to various embodiments, the intermediate adapter 322 may have a centering structure 1122a in the form of a recess into which the spacer element 206 may or may not be inserted. Similarly, the spacer element 206 may have a centering structure 1106a in the form of a recess into which the end block 104 may be or may be inserted. It can thus be achieved that the relative position or position of the end block 104 to the intermediate adapter 322, or the chamber wall 314w, is predefined. Illustratively, centering structure 1106a, 1122a may cause self-centering of end block 104 on the socket assembly.
    权利要求:
    Claims (13)
    [1]
    claims
    A socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) for holding an end block (104) to a process chamber, comprising: a first socket member (312) having a first fastener assembly (31); 110) for attaching the first pedestal member (312) to a process side of a process chamber wall and having a second attachment assembly (102a); and a second socket member (322) having a third mounting arrangement (102b) for attaching the second socket member (322) to the first socket member (322) and having a fourth mounting arrangement (120) for securing an end block (104) to the second Base element (322) on the process side; wherein the second mounting arrangement (102a) of the first socket element (312) and the third mounting arrangement (102b) of the second socket element (322) are designed to intermesh with play such that the second socket element (322) relative to the first socket element (312). is deflectable.
    [2]
    A socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to claim 1, wherein the second mounting arrangement (102a) of the first socket element (312) and the third mounting arrangement (102b) of the second socket element ( 322) are releasably inserted into one another.
    [3]
    The socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) of claim 1 or 2, wherein the fourth mounting arrangement (120) of the second socket member (322) for attaching an end block (104) the second socket element (322) is formed separately from the first fastening arrangement (110) of the first socket element (312).
    [4]
    4. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to one of claims 1 to 3, further comprising: a sealing structure (412d) for sealing a gap between the first base member (312) and the second socket member (322), wherein the sealing structure (412d) is disposed between adjacent portions of the first socket member (312) and the second socket member (322).
    [5]
    5. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to claim 4, wherein the first base member (312) for sealing against a process chamber wall (314w) has a further sealing area and wherein the second base member (322) for sealing a connection with the end block (104) has a further sealing area.
    [6]
    6. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to one of claims 1 to 5, further comprising: a resilient element (402m, 402e) which between the first base member (312) and the second socket member (322) so that the second socket member (322) is deflectable relative to the first socket member (312) against a return force.
    [7]
    A socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to claim 6, wherein said first mounting arrangement (110) of said first socket member (312) has a radially outwardly projecting projection and said fourth mounting arrangement (31). 102a) of the second socket member (322) has a radially inwardly projecting projection which when mated overlap each other, and wherein the resilient member (402m, 402e) is disposed between the projections.
    [8]
    8. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to one of claims 1 to 6, further comprising: a spacer element (206) which on the fourth mounting arrangement (120) of the second socket element (322 ) and a distance between the second base member (322) and an end block (104) to be attached thereto.
    [9]
    9. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to claim 8, wherein the spacer element (206) comprises a thermally and / or electrically insulating material (206i) for thermally and / or electrically insulating the second socket member (322) from an end block (104) to be attached thereto.
    [10]
    10. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to one of claims 1 to 9, further comprising: a connecting element (412s) which the second mounting arrangement (102a) of the first socket element (412s) 312) and the third mounting arrangement (102b) of the second socket member (322) penetrates.
    [11]
    A socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to any one of claims 1 to 10, wherein the second mounting arrangement (102a) of the first socket element (312) and the third mounting arrangement (102b) the second socket member (322) surrounds a through hole (102d) penetrating the socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) to receive a supply assembly (1102).
    [12]
    12. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to one of claims 6 to 11, wherein the second fastening arrangement (102a) of the first base member (312) and / or the third fastening arrangement ( 102b) of the second base element (322) has an opening into which the resilient element (402m, 402e) protrudes and forms a connection element for connecting the resilient element (402m, 402e) to another connection element.
    [13]
    13. socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) according to one of claims 1 to 12, wherein between the first base member (312) and the second base member (322) has a gap (102s) extends.
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    同族专利:
    公开号 | 公开日
    US20160111265A1|2016-04-21|
    CN105529580A|2016-04-27|
    US10181393B2|2019-01-15|
    DE102014115282B4|2019-10-02|
    BE1023248A1|2017-01-11|
    DE102014115282A1|2016-04-21|
    CN105529580B|2020-03-03|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20030136672A1|2002-01-18|2003-07-24|Von Ardenne Anlagentechnik Gmbh|Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation|
    EP1752557A1|2005-08-10|2007-02-14|Applied Materials GmbH & Co. KG|Vacuum coating apparatus with powered rotating cathode|
    WO2007147757A1|2006-06-19|2007-12-27|Bekaert Advanced Coatings|Insert piece for an end-block of a sputtering installation|
    DE102008033902A1|2008-07-18|2010-01-21|Von Ardenne Anlagentechnik Gmbh|End block for a magnetron assembly with a rotating target and vacuum coating equipment|
    US5100527A|1990-10-18|1992-03-31|Viratec Thin Films, Inc.|Rotating magnetron incorporating a removable cathode|
    EP0969238A1|1998-06-29|2000-01-05|Sinvaco N.V.|Vacuum tight coupling for tube sections|
    CA2318781C|1998-11-25|2007-10-23|Surfcoat Co., Ltd.|Printing or coating method and printing or coating device|
    US20060049043A1|2004-08-17|2006-03-09|Matuska Neal W|Magnetron assembly|
    DE102008033904B4|2008-07-18|2012-01-19|Von Ardenne Anlagentechnik Gmbh|Drive end block for a magnetron assembly with a rotating target|US20190103295A1|2017-09-29|2019-04-04|Taiwan Semiconductor Manufacturing Co., Ltd.|Integrated Circuit Fabrication System with Adjustable Gas Injector|
    DE102018113483A1|2018-06-06|2019-12-12|VON ARDENNE Asset GmbH & Co. KG|Evaporative magazine, evaporator and process|
    US10991544B2|2019-05-29|2021-04-27|ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH|Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen|
    法律状态:
    2018-12-07| FG| Patent granted|Effective date: 20170111 |
    2018-12-07| PD| Change of ownership|Owner name: VON ARDENNE ASSET GMBH & CO. KG; DE Free format text: DETAILS ASSIGNMENT: CHANGE OF OWNER(S), CESSION; FORMER OWNER NAME: VON ARDENNE GMBH Effective date: 20181011 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102014115282.4A|DE102014115282B4|2014-10-20|2014-10-20|socket assembly|
    DE102014115282.4|2014-10-20|
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